MFC2030/MFC2070 Bi-Directional Digital MEMS Gas Flow Sensor

High Performance Bi-Directional
Digital MEMS Gas Flow Sensor
MFC2000 Series

MFC2030/MFC2070 Digital MEMS Gas Flow Sensor DESCRIPTION
MFC2000 series is a new gas flow sensing module platform based on MEMSIC’s proprietary CMOS technology for thermal mass flow sensing. It can measure up to 70 SLM bi-directional flow rate with +/-3.0% accuracy. 

The sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a digital or analog output with very high repeatability. The  module  has  very  low  operating  power consumption (<5 mA) and a low power consumption sleep mode (<100 µA) for optimal power management in portable applications. The MFC2000 series is externally powered, up to 5.5V (3.3V typ.). I2C digital output is standard. Other output available upon request.

MFC2030/MFC2070 Digital MEMS Gas Flow Sensor FEATURES
•  Bi-directional flow
•  High dynamic range
•  ±3% m.v. accuracy
•  ±0.6% m.v. repeatability
•  Low power consumption
•  Fast response time
•  Single 2.7 - 5.5Vdc power supply
•  Digital I2C and analog outputs
•  Standard fitting sizes
•  Custom fluid connector available
•  Temperature compensated
•  Highly configurable firmware
•  Easy-to-use PC-based GUI
•  RoHS and WEEE compliant

MFC2030/MFC2070 Digital MEMS Gas Flow Sensor APPLICATIONS
• Medical gas flow measurement and control
• Industrial gas flow measurement and control
• Consumer products

MFC2030/MFC2070 Digital MEMS Gas Flow Sensor CHARACTERISTICS
(Measurements performed with air at 23°C temperature, 1 Atm pressure, 50% RH, at 5.0V DC power supply, unless otherwise specified). Calibration conditions for standard liters per minute slm: 20°C, 1013mbar.

MFC2030/MFC2070 Digital MEMS Gas Flow Sensor ABSOLUTE MAXIMUM RATINGS

MFC2030/MFC2070 Digital MEMS Gas Flow Sensor ORDERING INFORMATION